CEEN13150 - Semiconductors and Materials Failure Analyses Tools and Practices

Course Description

This is the last course of the 3-course training program on semiconductor and materials failure analyses. In this course, case study and practice on semiconductor and materials failure analysis will be conducted. Hands-on experience with analytical tools such as semiconductor analyzer, scanning electron microscope (SEM), materials compositional and atomic analysis tools such energy dispersive spectroscopy (EDS) and backscatter electron diffractometry (EBSD) will be offered at Oakland University’s Advanced Micro Analytical Laboratory. Prior to practical sessions of the course, fundamentals on such analytical instruments with case study will be reviewed.

Topics covered:

1. Current-voltage (I ~ V) and capacitance-voltage (C-V) responses of typical Semiconductor devices.
2. Semiconductor characterization with Keithley SCS-4200A semiconductor tester.
3. Semiconductor devices failure analysis with SEM
4. Materials analysis with EDS and XRD
5. Semiconductor failure site and inspection
6. Other advanced analytical techniques